Wu, XiangyuXiangyuWuLin, DennisDennisLinCott, DaireDaireCottDe Marneffe, Jean-FrancoisJean-FrancoisDe MarneffeGroven, BenjaminBenjaminGrovenSergeant, StefanieStefanieSergeantShi, YuanyuanYuanyuanShiSmets, QuentinQuentinSmetsSutar, SurajitSurajitSutarAsselberghs, IngeIngeAsselberghsRadu, IulianaIulianaRadu2022-03-162022-03-162021naWOS:000675595800126https://imec-publications.be/handle/20.500.12860/39455ALD Encapsulation of CVD WS2 for Stable and High-Performance FET DevicesProceedings paper10.1109/EDTM50988.2021.9420940978-1-7281-8176-9WOS:000675595800126