Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damage

Hiblot, GaspardGaspardHiblotLiu, YefanYefanLiuHellings, GeertGeertHellingsVan der Plas, GeertGeertVan der Plas2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33157Comparative analysis of the degradation mechanisms in logic and I/O FinFET devices induced by plasma damageProceedings paperhttps://ieeexplore.ieee.org/document/8720525