Dutta, ShibeshShibeshDuttaBeyne, SofieSofieBeyneGupta, AnshulAnshulGuptaKundu, ShreyaShreyaKunduBender, HugoHugoBenderVan Elshocht, SvenSvenVan ElshochtJamieson, GeraldineGeraldineJamiesonVandervorst, WilfriedWilfriedVandervorstBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiAdelmann, ChristophChristophAdelmann2021-10-252021-10-2520180741-3106https://imec-publications.be/handle/20.500.12860/30659Sub-100 nm2 cobalt interconnectsJournal articlehttps://doi.org/10.1109/LED.2018.2821923