A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversion

Heyne, MarkusMarkusHeyneMarinov, DaniilDaniilMarinovBraithwaite, NicholasNicholasBraithwaiteGoodyear, AndyAndyGoodyearde Marneffe, Jean-FrancoisJean-Francoisde MarneffeCooke, MikeMikeCookeRadu, IulianaIulianaRaduNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-272021-10-2720192053-1583https://imec-publications.be/handle/20.500.12860/33149A route towards the fabrication of 2D heterostructures using atomic layer etching combined with selective conversionJournal articlehttps://doi.org/10.1088/2053-1583/ab1ba7