Effect of nitridation on l/f noise in n-MOSFETs with high-k dielectric

Srinivasan, PurushothamanPurushothamanSrinivasanSimoen, EddyEddySimoenPantisano, LuigiLuigiPantisanoClaeys, CorCorClaeysMisra, D.D.Misra2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11264Effect of nitridation on l/f noise in n-MOSFETs with high-k dielectricMeeting abstract