SiGe, Ge and III-V materials and processes for beyond-Si CMOS and More-than-Moore applications

Caymax, MattyMattyCaymax2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18647SiGe, Ge and III-V materials and processes for beyond-Si CMOS and More-than-Moore applicationsProceedings paper