Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistors

Nakabayashi, M.M.NakabayashiOhyama, HidenoriHidenoriOhyamaKobayashi, K.K.KobayashiYoneoka, M.M.YoneokaSimoen, EddyEddySimoenClaeys, C.C.ClaeysTakami, Y.Y.TakamiSunaga, H.H.SunagaTakizawa, H.H.Takizawa2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4606Influence of mechanical stress on the electrical performance of polycrystalline-silicon resistorsOral presentation