Opto-mechanical ultrasound sensor (OMUS) in a silicon photonic chip

Westerveld, WouterWouterWesterveldMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanRottenberg, XavierXavierRottenbergSeveri, SimoneSimoneSeveriRochus, VeroniqueVeroniqueRochus2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34438Opto-mechanical ultrasound sensor (OMUS) in a silicon photonic chipMeeting abstract