Metal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignment

Scheerlinck, StijnStijnScheerlinckDubruel, PeterPeterDubruelBienstman, PeterPeterBienstmanSchacht, EtienneEtienneSchachtVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-182021-10-182009-05https://imec-publications.be/handle/20.500.12860/16167Metal grating patterning on fiber facets by UV-based nano imprint and transfer lithography using optical alignmentJournal article