CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensing

Ryckeboer, EvaEvaRyckeboerNie, XiaominXiaominNieSubramanian, AnanthAnanthSubramanianMartens, DaanDaanMartensBienstman, PeterPeterBienstmanClemmen, StephaneStephaneClemmenSeveri, SimoneSimoneSeveriJansen, RoelofRoelofJansenRoelkens, GuntherGuntherRoelkensBaets, RoelRoelBaets2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27251CMOS-compatible silicon nitride spectrometers for lab-on-a-chip spectral sensingProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2523727