Szlufcik, JozefJozefSzlufcikDe Clercq, KoenKoenDe ClercqDe Schepper, PatrickPatrickDe SchepperPoortmans, JefJefPoortmansBuczkowski, A.A.BuczkowskiNijs, JohanJohanNijsMertens, RobertRobertMertens2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/372Improvement in multicrystalline silicon solar cells after thermal treatment of PECVD silicon nitride AR coatingProceedings paper