Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditions

Merkulov, AlexAlexMerkulov2025-07-302024-12-312025-07-3020242166-2746WOS:001381321400002https://imec-publications.be/handle/20.500.12860/45027Ultralow impact energy dynamic secondary ion mass spectrometry with nonfully oxidizing surface conditionsJournal article10.1116/6.0004064WOS:001381321400002DATA REDUCTION ALGORITHMSIMS