Honicke, P.P.HonickeBeckhoff, B.B.BeckhoffKolbe, M.M.KolbeList, ScottScottListConard, ThierryThierryConardStruyf, HerbertHerbertStruyf2021-10-172021-10-1720080584-8547https://imec-publications.be/handle/20.500.12860/13886Depth-profiling of vertical sidewall nanolayers on structured wafers by grazing incidence X-ray fluorescenceJournal article