Development of a dielectric CMP process for replacement gate applications

Devriendt, KatiaKatiaDevriendtOng, PatrickPatrickOngKellens, KristofKristofKellensVeloso, AnabelaAnabelaVelosoCrabbe, YvoYvoCrabbeBrus, StephanStephanBrusClaes, MartineMartineClaesLeunissen, PeterPeterLeunissen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17020Development of a dielectric CMP process for replacement gate applicationsProceedings paper