Modlinski, RobertRobertModlinskiWitvrouw, AnnAnnWitvrouwRatchev, PetarPetarRatchevPuers, RobertRobertPuersden Toonder, Jaap M.J.Jaap M.J.den ToonderDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9310Creep characterization of Al alloy thin films for use in MEMS applicationsJournal article