A new method for the lifetime determination of submicron metal interconnects by means of parallel test structure

Vanstreels, KrisKrisVanstreelsD'Olieslaeger, MarcMarcD'OlieslaegerDe Ceuninck, WardWardDe CeuninckD'Haen, JanJanD'HaenMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9837A new method for the lifetime determination of submicron metal interconnects by means of parallel test structureProceedings paper