Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersAkanishi, YuyaYuyaAkanishivan der Veen, MarleenMarleenvan der VeenMizutani, AtsushiAtsushiMizutaniHolsteyns, FrankFrankHolsteyns2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/31136Effect of cleaning chemistries on cobalt: surface chemistriesProceedings paperhttps://www.scientific.net/SSP.282.263