Astoreca, LauraLauraAstorecaTabaei, Parinaz Saadat EsbahParinaz Saadat EsbahTabaeiSchaubroeck, DavidDavidSchaubroeckOp de Beeck, MaaikeMaaikeOp de BeeckMorent, RinoRinoMorentDe Smet, HerbertHerbertDe SmetDe Geyter, NathalieNathalieDe Geyter2021-10-282021-10-282020https://imec-publications.be/handle/20.500.12860/34653Visualizing the nucleation of ALD layers on polymersProceedings paper