Wen, LiangongLiangongWenGuo, BinBinGuoHaspeslagh, LucLucHaspeslaghSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwPuers, BobBobPuers2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/20146Thin film encapsulated SiGe accelerometer for MEMS above IC integrationProceedings paper