Estroff, AndrewAndrewEstroffFan, YongfaYongfaFanBourov, AnatolyAnatolyBourovSmith, BruceBruceSmithFoubert, PhilippePhilippeFoubertLeunissen, PeterPeterLeunissenPhilipsen, VickyVickyPhilipsenAksenov, YuriYuriAksenov2021-10-162021-10-162005-03https://imec-publications.be/handle/20.500.12860/10438Mask-induced polarization effects at high NAProceedings paper