Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopy

Ciesielski, RichardRichardCiesielskiBogdanowicz, JanuszJanuszBogdanowiczLoo, RogerRogerLooShimura, YosukeYosukeShimuraMani, AntonioAntonioManiMitterbauer, ChristophChristophMitterbauerKolbe, MichaelMichaelKolbeSoltwisch, VictorVictorSoltwisch2025-06-242025-01-092025-06-2420241932-5150WOS:001389147600020https://imec-publications.be/handle/20.500.12860/45051Interface sharpness in stacked thin film structures: a comparison of soft X-ray reflectometry and transmission electron microscopyJournal article10.1117/1.JMM.23.4.041405WOS:001389147600020REFLECTIONSCATTERINGSURFACES