SAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applications

Hou, LinLinHouDerakhshandeh, JaberJaberDerakhshandehArmini, SilviaSilviaArminiGerets, CarineCarineGeretsDe Preter, IngeIngeDe PreterRebibis, Kenneth JuneKenneth JuneRebibisMiller, AndyAndyMillerDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25395SAMs (self-assembled monolayers) passivation of Cobalt microbumps for 3D applicationsProceedings paperhttp://www.advancedmetallizationconference.com/agenda.html