Multifunctional nanomechanical systems via tunably coupled piezoelectric actuation

Masmanidis, SotirisSotirisMasmanidisKarabalin, RassulRassulKarabalinDe Vlaminck, IwijnIwijnDe VlaminckBorghs, GustaafGustaafBorghsFreeman, MarkMarkFreemanRoukes, MichaelMichaelRoukes2021-10-162021-10-162007-08https://imec-publications.be/handle/20.500.12860/12566Multifunctional nanomechanical systems via tunably coupled piezoelectric actuationJournal article