Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffraction

Tseng, PeterPeterTsengDillemans, LeanderLeanderDillemansGonzalez, MarioMarioGonzalezCheng, KaiKaiChengBorghs, GustaafGustaafBorghsLieten, RubenRubenLieten2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21640Strain relaxation and distribution in GaN nanopillars using in-plane X-ray diffractionMeeting abstract