Flip-chip bonding of VCSELs to silicon grating couplers via SU8 prisms fabricated using laser ablation

Kaur, KamalpreetKamalpreetKaurSubramanian, AnanthAnanthSubramanianVerplancke, RikRikVerplanckeCardile, PaoloPaoloCardileVan Kerrebrouck, JorisJorisVan KerrebrouckSpiga, S.S.SpigaMeyer, R.R.MeyerBauwelinck, JohanJohanBauwelinckBaets, RoelRoelBaetsVan Steenberge, GeertGeertVan Steenberge2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25458Flip-chip bonding of VCSELs to silicon grating couplers via SU8 prisms fabricated using laser ablationProceedings paper