Wada, MasayukiMasayukiWadaSano, TomohiroTomohiroSanoLeys, FrederikFrederikLeysDilliway, G.G.DilliwayLoo, RogerRogerLooMertens, PaulPaulMertensSnow, j.j.SnowIzumi, A.A.IzumiEitoku, A.A.Eitoku2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14768Effect of chemical growth air filter for wafer storage before epitaxial growthProceedings paper