Hoenicke, PhilippPhilippHoenickeKayser, YvesYvesKayserNikolaev, Konstantin, VKonstantin, VNikolaevSoltwisch, VictorVictorSoltwischScheerder, JeroenJeroenScheerderFleischmann, ClaudiaClaudiaFleischmannSiefke, ThomasThomasSiefkeAndrle, AnnaAnnaAndrleGwalt, GrzegorzGrzegorzGwaltSiewert, FrankFrankSiewertDavis, JeffreyJeffreyDavisHuth, MartinMartinHuthVeloso, AnabelaAnabelaVelosoLoo, RogerRogerLooSkroblin, DieterDieterSkroblinSteinert, MichaelMichaelSteinertUndisz, AndreasAndreasUndiszRettenmayr, MarkusMarkusRettenmayrBeckhoff, BurkhardBurkhardBeckhoff2023-01-172021-12-022023-01-1720221613-6810WOS:000722180500001https://imec-publications.be/handle/20.500.12860/38521Simultaneous Dimensional and Analytical Characterization of Ordered NanostructuresJournal article10.1002/smll.202105776WOS:000722180500001SYNCHROTRONGENERATIONMETROLOGYMEDLINE:34821030