Reaction mechanisms of Sn-based polarity-change copolymer resists with different counter anions, designed for extreme ultraviolet lithography

Hashimoto, KoheiKoheiHashimotoTakata, YuiYuiTakataMuroya, YusaYusaMuroyaKozawa, TakahiroTakahiroKozawaMachida, KoheiKoheiMachidaEnomoto, SatoshiSatoshiEnomotoNaqvi, BilalBilalNaqviDe Simone, DaniloDaniloDe Simone2025-02-242025-02-242025-FEB 10021-4922WOS:001421894400001https://imec-publications.be/handle/20.500.12860/45250Reaction mechanisms of Sn-based polarity-change copolymer resists with different counter anions, designed for extreme ultraviolet lithographyJournal article10.35848/1347-4065/adaefdWOS:001421894400001SENSITIVITY