Croes, KristofKristofCroesAdelmann, ChristophChristophAdelmannWilson, ChrisChrisWilsonZahedmanesh, HoumanHoumanZahedmaneshVarela Pedreira, OlallaOlallaVarela PedreiraWu, ChenChenWuLesniewska, AlicjaAlicjaLesniewskaOprins, HermanHermanOprinsBeyne, SofieSofieBeyneCiofi, IvanIvanCiofiKocaay, DenizDenizKocaayStucchi, MicheleMicheleStucchiTokei, ZsoltZsoltTokei2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30474Interconnect metals beyond copper: reliability challenges and opportunitiesProceedings paperhttps://ieeexplore.ieee.org/document/8614695