Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene lines

Iacopi, FrancescaFrancescaIacopiTokei, ZsoltZsoltTokeiStucchi, MicheleMicheleStucchiLanckmans, FilipFilipLanckmansMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7678Diffusion barrier integrity and electrical performance of Cu/porous dielectric damascene linesJournal article