Design, fabrication and characterization of electrostatic micro actuators for microfluidic platforms

Patrascu, MihaiMihaiPatrascuGonzalo Ruiz, JavierJavierGonzalo RuizGoedbloed, MartijnMartijnGoedbloedCrego Calama, MercedesMercedesCrego CalamaBrongersma, SywertSywertBrongersma2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19548Design, fabrication and characterization of electrostatic micro actuators for microfluidic platformsProceedings paper