De Coster, JeroenJeroenDe CosterPuers, BobBobPuersTilmans, HarrieHarrieTilmansvan Beek, J.T.M.J.T.M.van BeekRijks, T.G.S.M.T.G.S.M.Rijks2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7399Variable RF MEMS capacitors with extended tuning rangeProceedings paper