Resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scattering

Moors, KristofKristofMoorsSoree, BartBartSoreeMagnus, WimWimMagnus2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29018Resistivity scaling in metallic thin films and nanowires due to grain boundary and surface roughness scatteringJournal articlehttp://dx.doi.org/10.1016/j.mee.2016.10.015