Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform

Edinger, PierrePierreEdingerKristinsson, KristoferKristoferKristinssonErrando-Herranz, CarlosCarlosErrando-HerranzTakabayashi, Alain YujiAlain YujiTakabayashiSattari, HamedHamedSattariQuack, NielsNielsQuackVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsGylfason, Kristinn B.Kristinn B.Gylfason2022-09-212022-09-092022-09-2120212160-9020WOS:000831479802308https://imec-publications.be/handle/20.500.12860/40400Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platformProceedings paper978-1-943580-91-0WOS:000831479802308