Snow, JimJimSnowKraus, HaraldHaraldKrausVermeyen, KennethKennethVermeyenFyen, WimWimFyenMertens, PaulPaulMertensKovacs, FredericFredericKovacs2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9616Cleaning of metal gate stacks for the sub 90nm technology nodeProceedings paper