Hantschel, ThomasThomasHantschelSchulze, AndreasAndreasSchulzeDathe, AndreAndreDatheEyben, PierrePierreEybenvan der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeKe, XiaoxingXiaoxingKeVandervorst, WilfriedWilfriedVandervorst2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20777Three-dimensional electrical profiling of carbon nanotube interconnectsMeeting abstract