Clean dry strip process for implanted resist using water vapor plasma

Daviet, Jean-FrançoisJean-FrançoisDavietCoosemans, FrankFrankCoosemansVertommen, JohanJohanVertommen2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/95Clean dry strip process for implanted resist using water vapor plasmaMeeting abstract