Loo, RogerRogerLooSrinivasan, AshwynAshwynSrinivasanShimura, YosukeYosukeShimuraPorret, ClémentClémentPorretVan Thourhout, DriesDriesVan ThourhoutVan Deun, RikRikVan DeunStoica, TomaTomaStoicaBuca, DanDanBucaVan Campenhout, JorisJorisVan Campenhout2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26929Ge epitaxial growth in view of optical device applicationsMeeting abstract