Burkhardt, MartinMartinBurkhardtPhilipsen, VickyVickyPhilipsen2022-04-212021-11-022022-03-282022-04-082022-04-112022-04-192022-04-2120211932-5150WOS:000703599200003https://imec-publications.be/handle/20.500.12860/37471Special Series Guest Editorial: EUV MasksEditorial material10.1117/1.JMM.20.3.031008WOS:000703599200003EUV masks