RTA and FLA of Ultra-shallow implanted layers in Ge

Wündisch, C.C.WündischPosselt, M.M.PosseltAnwand, W.W.AnwandSchmidt, B.B.SchmidtMücklich, A.A.MücklichSkorupa, W.W.SkorupaClarysse, TrudoTrudoClarysseSimoen, EddyEddySimoen2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14800RTA and FLA of Ultra-shallow implanted layers in GeProceedings paper