Low loss nanophotonic waveguides and ring resonators in silicon-on-insulator

Baets, RoelRoelBaetsBogaerts, WimWimBogaertsTaillaert, DirkDirkTaillaertDumon, PieterPieterDumonBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan ThourhoutVan Campenhout, JorisJorisVan CampenhoutWiaux, VincentVincentWiauxWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckx2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8518Low loss nanophotonic waveguides and ring resonators in silicon-on-insulatorProceedings paper