Trap-assisted tunneling in high permittivity gate dielectric stacks

Houssa, MichelMichelHoussaTuominen, MarkoMarkoTuominenNaili, MohamedMohamedNailiAfanas'ev, V.V.Afanas'evStesmans, AndreAndreStesmansHaukka, S.S.HaukkaHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4439Trap-assisted tunneling in high permittivity gate dielectric stacksJournal article