Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxy

Peto, G.G.PetoMolnar, G.G.MolnarKotai, E.E.KotaiDezsi, I.I.DezsiKarsteen, M.M.KarsteenSodervall, U.U.SodervallWillander, M.M.WillanderCaymax, MattyMattyCaymaxLoo, RogerRogerLoo2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6708Formation of epitaxial CoSi2 films on Si and on Si/Si80Ge20 (100) by reactive deposition epitaxyJournal article