Design strategy for integrating DSA via patterning in sub-7 nm interconnects

Karageorgos, IoannisIoannisKarageorgosRyckaert, JulienJulienRyckaertTung, C. MaryannC. MaryannTungWong, H.-S. PhilipH.-S. PhilipWongGronheid, RoelRoelGronheidBekaert, JoostJoostBekaertCroes, KrisKrisCroesKarageorgos, EvangelosEvangelosKarageorgosVandenberghe, GeertGeertVandenbergheStucchi, MicheleMicheleStucchiDehaene, WimWimDehaene2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26808Design strategy for integrating DSA via patterning in sub-7 nm interconnectsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2505330