Modelling of the RF self-actuation of electrostatic RF-MEMS devices

Rottenberg, XavierXavierRottenbergBrebels, StevenStevenBrebelsNauwelaers, BartBartNauwelaersMertens, RobertRobertMertensDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9531Modelling of the RF self-actuation of electrostatic RF-MEMS devicesProceedings paper