Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells

Ivanov, AlexeyAlexeyIvanovSorgenfrei, RalfRalfSorgenfreiGust, ElkeElkeGustBarth, PhilippPhilippBarthVan Nieuwenhuysen, KrisKrisVan NieuwenhuysenKuehnhold, SaskiaSaskiaKuehnholdRiepe, StephanStephanRiepeJanz, StefanStefanJanz2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30941Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cellsMeeting abstract10.4229/35thEUPVSEC20182018-2AO.6.6