Fast Fourier transform scanning spreading resistance microscopy: a novel technique to overcome the limitations of classical conductive AFM techniques

Eyben, PierrePierreEybenBisiaux, PierrePierreBisiauxSchulze, AndreasAndreasSchulzeNazir, AftabAftabNazirVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-2220150957-4484https://imec-publications.be/handle/20.500.12860/25259Fast Fourier transform scanning spreading resistance microscopy: a novel technique to overcome the limitations of classical conductive AFM techniquesJournal articlehttp://iopscience.iop.org/article/10.1088/0957-4484/26/35/355702/pdf