Xu, XiuMeiXiuMeiXuVereecke, GuyGuyVereeckeChen, ChangChangChenPourtois, GeoffreyGeoffreyPourtoisArmini, SilviaSilviaArminiVerellen, NielsNielsVerellenStruyf, HerbertHerbertStruyfHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe Gendt2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23413Capturing wetting states in nanopatterned siliconOral presentation