Claes, MartineMartineClaesRöhr, ErikaErikaRöhrDe Gendt, StefanStefanDe GendtLagrange, SébastienSébastienLagrangeBergman, E.E.BergmanHeyns, MarcMarcHeyns2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6113Ozonated HF applications in a spray processing toolProceedings paper