The integration of a low-k material with high organic content in a non-etchback process

Waeterloos, JoostJoostWaeterloosMeynen, HermanHermanMeynenCoenegrachts, BartBartCoenegrachtsVanhaelemeersch, SergeSergeVanhaelemeerschGrillaert, JoostJoostGrillaertVan den hove, LucLucVan den hove2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1644The integration of a low-k material with high organic content in a non-etchback processProceedings paper